Mark Camenzind Ph.D., Anurag Kumar, Ph.D., Latif Ahmed, Ph.D.
Proceedings of the Semiconductor Pure Water and Chemical Conference (SPWCC)
Construction materials and polymers used in cleanrooms are major sources of organic contaminants. In cleanrooms that are used for critical processes in the semiconductor, disk drive, optical and aerospace industries, these materials can outgas organic compounds and cause significant yield losses. Read more