Mark J. Camenzind, Latif Ahmed, Anurag Kumar
Proceedings of Photonics West
January 1999
Organic contaminants can affect semiconductor wafer processing including gate oxide integrity, polysilicon growth, deep ultraviolet photoresist line-width, and cleaning and etching steps. Organophosphates are known to counter dope silicon wafers. Organic contaminants in disk drives can cause failure due to stiction or build up on the heads. Therefore, it is important to identity organic contaminants adsorbed on wafer or disk surfaces and find their sources so they can either be completely eliminated or at least controlled. Read more