C. Clarine Anderson
Proceedings of the Semiconductor Pure Water Conference (SPWC)
January 1990
The purpose of this paper is to describe our evaluations of particle counting methods. As a private laboratory working with the semiconductor and electronics industries, we perform particle count evaluations of high purity water. Usually counts are taken routinely, weekly or bi-weekly, for the purpose of routine monitoring. Less frequently, when contaminated water is suspected as the cause of yield loss, testing is done under emergency conditions. Read more