Theresa Chu, Barbara Stancyzk
Proceedings of the Semiconductor Pure Water Conference (SPWC)
January 1987
The quality of D.I. Water in terms of particle contamination is extremely crucial for most of the products manufactured by the electronic industry. The SEM (Scanning Electron Microscope) analysis of particles and bacteria in D.I. water has been used by the semiconductor industry for only a few years. SEM Analyses revealed several problems in filtration and distribution systems, which were not detectable until the SEM method was employed. Read more