Lynn Vanatta, David Coleman
Proceedings of the Semiconductor Pure Water and Chemicals Conference (SPWCC)
February 2004
Measurement systems are at the heart of most all analytical laboratories, and generate data upon which chemical quality control and fab processes are based. To assess the quality of such results, various statistical procedures have been devised and implemented. However, the reliability and usefulness of these protocols depend not only on the care with which they are implemented, but also on the degree to which their underlying assumptions are understood and met. Read more