Dan Cowles, Scott Anderson and Hugh Gotts
November 2007
The semiconductor industry is moving toward data on demand to monitor the levels of cleanroom contaminants. No single (or simple combination of) instrument(s) is available today that is sufficiently sensitive, absolutely selective and reliable to meet the requirements and provide the required online monitoring of all desired airborne molecular contamination (AMC) present in semiconductor fabs. However, on-line monitors are rapidly improving, and we present here a review of the monitoring requirements and the tools that can address these requirements. Read more