Phil Clancy and Scott Anderson
Semiconductor International
April 2007
The purity of chemicals used to manufacture semiconductor devices is of critical importance to fab engineers. Contamination in process materials can cause device failure and impact yield. Because most fabs do not maintain the analytical instrumentation and expertise to test chemicals prior to use, they rely solely on the certificate of analysis (COA) supplied by the vendor for contaminant concentration in process chemicals. But standard certificates of analysis (COAs) for new materials may not be as reliable as you think. Read more