Theresa Chu and Marjorie K Balazs
Proceedings of the Semiconductor Pure Water and Chemicals Conference (SPWCC)
February 1992
Ultrapure water is recognized as the "bloodstream" in the manufacturing of semiconductor devices and products. Over the past decade, tremendous improvement has been made in both the making and the testing of ultrapure water. Specifications for ultrapure water at the the point of distribution (final filter) have been published and adopted by the industry for years. Read more