Marjorie K. Balazs
Characterization and Metrology for LSI Technology: 1998 International Conference
The analysis of liquids to obtain information about semiconductor materials is known in the industry as "wet chemistry" and has been used since the beginning of the production of IC's. However, the analytical procedures never gained any significant attention until the mid 70's when the absolute measurement of phosphorus in PSG films by wet chemical analysis was incorporated by several industrial labs as the standard method of analysis. Read more