Fuhe Li and Scott Anderson
This article describes an alternative dose analysis methodology for ultra low energy (ULE) ion implantation. Although typically the domain of SIMS, the coupling of laser ablation (LA) for sampling and detection via inductively coupled plasma (ICP) mass spectrometry as SARISTM permits advantages and functionality not previously available. Spatial and temporal separation of sampling and ionization by utilizing two powerful plasma sources results in much more efficient ionization and more quantitative measurements with less matrix effects. Read more