Ceramics parts are commonly used in Semiconductor manufacturing as wafer holders in CVD processes. In the frame of cost reduction programs and contamination control, some S/C manufacturers expressed a need for non-destructive analytical technique able to characterize the contamination level of these ceramics parts. This paper describes Air Liquide’s analytical solution to such issue for ceramics parts used in WF₆ CVD processes. Several analytical techniques are compared to consolidate the study. The proposed analytical procedure turns out as a relevant ool for ceramics clean procedures qualification as well as a determining factor for predictive ceramics parts exchange Read more