Laurent Doyen, Romain Joly, Maryse Bellmunt, Fuhe Li, Hervé Dubus, Didier Bourdenet
Ceramics parts are commonly used in Semiconductor manufacturing as wafer holders in CVD processes. In the frame of cost reduction programs and contamination control, some S/C manufacturers expressed a need for non-destructive analytical technique able to characterize the contamination level of these ceramics parts. This paper describes Air Liquide’s analytical solution to such issue for ceramics parts used in WF₆ CVD processes. Several analytical techniques are compared to consolidate the study. The proposed analytical procedure turns out as a relevant ool for ceramics clean procedures qualification as well as a determining factor for predictive ceramics parts exchange Read more