Mark J. Camenzind, Hongjian Liang, Janos Fucsko and Marjorie K. Balazs
Micro
October 1995
Semiconductor manufacturers have long been aware of the importance of a clean environment for maintaining high production yields. As chip geometries and complexity have increased, cleanroom technology has kept pace, dropping from Class 1000 through Class 100 to Class 10 and Class 1 as ever increasing amounts of HEPA and ULPA filtration and the gowning of personnel have enabled significant reductions in airborne particle levels. Read more