Sushma Mahotra (AMD), Otto Chan (AMD), Theresa Chu (Balazs), Agota Fucsko (Balazs)
Ultrapure Water
May/June 1996
Historically, dissolved silica has been used to monitor ion exchange resin in reverse osmosis/deionized (RO/DI) water systems. It is common knowledge that dissolved silica is the first ion that breaks through when the ion exchange resin is approaching depletion. Recently, the authors correlated boron breakthrough with dissolved silica and associated resistivity drop at Advanced Micro Devices (AMD), Sunnyvale, Calif.  Read more