Dan Cowles and David Bollinger
SEMICON West 2002
This paper describes a point-of-use (POU) sampling/offsite analysis method for quantification of metal impurities in trichlorosilane (TCS). The sampling method described here is based on hydrolysis of TCS in aqueous HF. Analysis of metal impurities in the hydrolysis solution is achieved by inductively-coupled plasma mass-spectroscopy (ICP-MS). Read more