Victor K. F. Chia, Fuhe Li
FEO Magazine
Tool cleanliness is a prerequisite for increased production ramp, reduced tool downtime and high process yields. Any materials used in the build of material (BOM) must be verified to be clean both in the bulk of the material and on its surface after machining and cleaning. Bulk analyses are destructive due to the nature of the test and the information required. In contrast, surface analyses should be nondestructive so the part may be reused after surface cleanliness testing, or re-cleaned if the test indicates the part does not pass its cleanliness specification. Read more