David Blackford, Ph.D., Art Ackerman, P.E., Glen Wildermuth, P.E., Sarah Schoen, Ph.D.
Ultrapure Water Journal
January 2010
To successfully manufacture semiconductor devices, particles containing ultrapure water must be controlled and the elements within the particles identified. Current guidelines suggest that these particles should be smaller than one half the line width of the device geometry, yet the available optical particle counters can only measure particles > 40 nanometers. Read more