At SPWCC, Dr. Dan Cowles, Gas Lab Manager for Air Liquide-Balazs Analytical Services will present a paper on "Reactive Gas Sampling and Analysis for Metals." Reactive, liquefied gases, such as dichlorosilane, trichlorosilane (TCS), anhydrous ammonia, and anhydrous HF are a class of chemicals widely used in semiconductor processing. Delivery of these corrosive gases to the point-of-use (POU), in a manner that avoids contamination by metallic elements, is an ongoing challenge. Read more