By Dr. Hugh Gotts and David Bollinger
2006
Decreasing impurity levels in materials used by the semiconductor industry ensure greater device functionality at smaller device geometries. The most commonly used solvent in the semiconductor fabrication process, ultra pure water (UPW), is not immune to meeting these increasingly stringent specifications. Committees for the International Technology Roadmap for Semiconductors (ITRS) set specifications for materials based on future semiconductor device geometry trends. Read more