Analytical Insight
Fall 2004
At the end of 2003, the ITRS (International Technology Roadmap for Semiconductors) added recommendations for SMC (Surface Molecular Contamination) on witness wafers exposed to the clean room, mini-environments, wafers shippers and other environments. Being an active contributor to the roadmap, Balazs offers the tests required by the 2003 release for performing baselines, routine monitoring, or troubleshooting in clean room environments.  Read more