Dr. Dan Cowles, Dr. Mary Havlicek, Lynn Vanatta, Piyamit Chitrathorn
Balazs™ Analytical Services developed a method for capture and analysis of airborne urea. Urea is a problematic contaminant in fabs, first because it is a reactive amine, and secondly because it can decompose to ammonia. Amines generally, and ammonia in particular, are critical impurities for photolithography. Although a method is already in place at Balazs to quantify urea in water, a sampling method for airborne urea provides further control and quantification of this semi-volatile contaminant for the fabs.  Read more