This article summarizes the use and advantages of using Glow Discharge Optical Emission Spectroscopy (GD-OES) as part of an overall analysis program for advanced materials (i.e. hafnium and zirconium precursors) and any other thin-films. Other equipment and techniques such as Laser Ablation IC-PMS and SIMS provide complimentary data to provide a comprehensive analytical report of a sample. Read more