Balazs News
Summer 2006
In addition to particles, Airborne and Surface Molecular Contamination (AMC and SMC) can, and do lead to substantial yield loss in today’s fabs. AMC monitoring remains a vital part of ensuring cleanroom quality and process yield, however SMC is receiving increased attention and definition within the industry. SMC was added to the ITRS recently and addressed critical levels of Metals, Dopants, and Organics on the wafer surface.  Read more