Analytical Insight
Spring 2009
TMAH (Tetramethyl ammonium hydroxide) is an organic amine used by the semiconductor industry in a wide number of applications, including photolithography development, wafer cleaning, silica etching, and in CMP slurries. TMAH is widely used because it provides a basic pH solution with no mobile ions, such as Na+ or K+. TMAH is also available in high purity semiconductor grade, with low metallic and anionic contamination. Read more