Dr. Victor K.F. Chia
15th International Symposium on the Physical and Failure Analysis of Integrated Circuits
July 2008
Tool cleanliness is a prerequisite for increased production ramp, reduced tool down-time and high process yields. Any materials used in the build of material (BOM) must be verified to be clean both in the bulk of the material and on its surface after machining and cleaning. Bulk analyses are destructive due to the nature of the test and the information required. In contrast, surface analyses should be non -destructive so the part may be re-used after surface cleanliness testing or re-cleaned if the test indicates the part does not pass its cleanliness specification. This paper describes key analytical techniques for bulk and surface characterization of tool parts. Read more