Balazs™ Analytical Services believes guidelines should be used as a starting point for setting water quality specifications. Our guidelines are compiled from real world data which is currently used successfully by our customers. Each customer site and process will need to develop a set of specifications based on their own specific internal requirements. The original guidelines proposed several years ago by Balazs™ were adopted by SEMI in 1996 and are currently published in SEMI-F63. Read more