Sample Types
- Cleaning chemicals
- Processing chemicals
- Lithographic chemicals
- Etching chemicals
- Copper plating solutions
- CVD/ALD Precursor Compounds
- Slurries
Analyses Provided
- Trace Metals
- Anions
- Organics
- Assay
- Material compatibility studies
- SEMI tests
Techniques
Analytical
- Inductively coupled plasma mass spectroscopy (ICP-MS)
- Inductively coupled plasma optical emission spectroscopy (ICP-OES)
- Ion chromatography (IC)
- Gas chromatography mass spectroscopy (GC-MS)
- Fourier transform infrared (FTIR)
- Auto-titrator
Slurry off-line testing solutions
- Particle size and distribution
- % solids
- Specific gravity
- pH
- Viscosity
- Titration for H2O2 or other additives
- Trace metals
- Corrosion inhibitors
- Particles
Slurry on-line testing solutions
Contact us for more details