Chemical characterization is critical for incoming quality control, at the point of distribution (POD), and at the point of use (POU) to ensure that chemical species and/or contamination is at a proper concentration for semiconductor process steps.

Sample Types

Analyses Provided

  • Trace Metals
  • Anions
  • Organics
  • Assay
  • Material compatibility studies
  • SEMI tests



  • Inductively coupled plasma mass spectroscopy (ICP-MS)
  • Inductively coupled plasma optical emission spectroscopy (ICP-OES)
  • Ion chromatography (IC)
  • Gas chromatography mass spectroscopy (GC-MS)
  • Fourier transform infrared (FTIR)
  • Auto-titrator¬†

Slurry off-line testing solutions

  • Particle size and distribution
  • % solids
  • Specific gravity
  • pH
  • Viscosity
  • Titration for H2O2 or other additives
  • Trace metals
  • Corrosion inhibitors
  • Particles

Slurry on-line testing solutions

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Application Notes