Balazs™ NanoAnalysis provides both sampling kits as well as analytical services to identify elements and compounds present in air ionizer tip deposits, which have formed as a result of the air ionizers reacting with Airborne Molecular Contamination (AMC) in cleanroom air.
ESD and Corona Air Ionizer Tip Deposit Analysis

With tip deposit identification, Balazs™ is able to help identify elements that aids pinpointing the AMC source, leading to the elimination/control of AMC. Such sampling and analyses can improve ionizer performance, reduce particulation and decrease risk to wafers, optics, reticles and scanners.

To request a quote for Air Ionizer Tip Deposit Analysis, please click here

Sampling Methods

  • Tip removal (for ceiling emitters)
  • Crush tubes/ swabs (call first to discuss)
  • Quadbars (call first to discuss)

Sampling Kits Offered

  • Tip removal kit (for ceiling emitters)
  • Balazs™ custom tweezers, 8 tip holders, field sampling instructions

To request a sample kit, click here

Analytical Techniques

  • Scanning Electron Microscopy with Energy Dispersive X-Ray Spectroscopy (SEM-EDS), used for main elemental ID, provides surface analysis
  • Inductively Coupled Plasma Mass Spectrometry (ICP-MS), used for quantitative results of entire tip deposit

Related Documents

Cleanroom Evaluation RFA Fremont

For more information about air ionizers and air ionizer tip deposit analysis, the following resources are provided:
APP0483 Air Ionizer Tip Deposit Analysis