Thin film characterization is one of many core technologies at Balazs NanoAnalysis. As a global leader, Balazs has supported hundreds of high-technology companies in their R&D and manufacturing processes. Raising the bar on quality, performance, and problem solving is how Balazs finds new and innovative ways to help its clients reach their goals.
Film Characterization

Typical Films Analyzed

Semiconductor and Disk Drive

  • Silicon, native and thermal silicon oxides, silicon nitride, and silicon oxynitride
  • BSG, PSG, and BPSG low-k dielectrics
  • Atomic layer deposition (ALD) metal oxides
  • Aluminum, copper doped aluminum, copper, and other films used for interconnect
  • Alumina, anodized alumina, diamond, graphite, and SiC
  • SiGe, GaAs, TiW, NiCr, FeCr, III-V and II-VI films
  • GST, SST and other phase change memory (PCM)
  • NiP and hard disks
  • Others...

Photovoltaic and Solar

  • Silicon films (single, polysilicon, and ribbon)
  • CdTe
  • CIG, CdS, Indium (In) and CIGS
  • Carbon / graphite
  • AZO and other TCO front contact
  • Mo, Cu, and other back contacts
  • Encapsulation thin films
  • Others...

Analyses Provided

  • Compositional analysis
  • Depth profiling, line scan and three-dimensional mapping
  • Microscopic or local analysis for contamination identification
  • Surface analysis
  • Trace in-film impurity analysis

Analytical Techniques

  • Glow discharge optical emission spectroscopy (GD-OES)
  • Inductively coupled plasma mass spectrometry (ICP-MS)
  • Inductively coupled plasma optical emission spectroscopy (ICP-OES)
  • Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
  • Energy dispersive spectroscopy (SEM-EDS)
  • Secondary ion mass spectrometry (SIMS)
  • UV/Vis spectroscopy
  • X-ray fluorescence (XRF)
  • Auger (AES)
  • Electron spectroscopy for chemical analysis / X-ray photoelectron spectroscopy (ESCA/XPS)
  • Interstitial gas analysis
  • Minority carrier lifetime measurement (MCL)
  • Rutherford backscattering spectroscopy (RBS)
  • Time of flight secondary ion mass spectrometry (TOF-SIMS)
  • X-ray diffraction (XRD), total reflection X-ray fluorescence (TXRF), and X-ray imaging

Application Notes