Typical Gases Analyzed
- Carrier gases (N2, O2, H2, CDA)
- Rare (He, Ne, Ar, Kr, Xe)
- Reactive
- Advanced precursors (organosilicons, organometallics)
- Halocarbons (Freons™, fluorocarbons)
- Cleanroom air
Analyses Provided
- Air components
- Rare gases
- Trace metals
- Assays
- Impurity surveys
- Pure-gas and gas mixture re-certifications
- Volatile contaminants
- Sulfur compounds
- Analysis of films deposited from gases
- Others
Analytical Techniques
- Gas chromatography - mass spectrometry (GC-MS)
- Gas chromatography - discharge ionization detector (GC-DID)
- Gas chromatography - flame ionization detector (GC-FID)
- Total hydrocarbons analyzer (THC)
- Fourier-transform infrared spectroscopy (FTIR)
- Real-time: Trace sulfur, Trace Oxygen, and Trace Moisture
- Other proprietary methods
Lithography Concerns
In order to maintain full warranty coverage for steppers, manufacturers require tool owners to meet explicit air and purge gas contamination specifications. Additionally, periodic analyses of refractory compounds are also required. In order to fulfill these requirements, Balazs offers stepper/scanners environment analyses to meet ITRS and OEM requirements.