Materials and components used throughout the fab are potential sources of contamination. Balazs NanoAnalysis expertise will allow you to determine actual levels of cleanliness and whether a material or component can introduce unwanted contamination.
Material and Component Evaluation

Sample Types

Materials are tested for surface and bulk contamination

  • Wafer carriers/shippers
  • Valves
  • Wafers
  • Filters and their components
  • Piping material
  • Tubing/hoses and fittings
  • Reactor components
  • Wipes, rollers and brushes
  • Gloves, gowns and disposables
  • Wet bench material
  • Polymeric resin beads
  • HEPA/ULPA filters
  • Any material contained or processed in the cleanroom environment

Analyses Provided

  • Metals
  • Anions
  • Cations
  • Organics
  • Particles

Techniques

Sampling

  • UPW extraction
  • Acid extraction
  • Solvent extraction
  • Direct surface analysis

Analytical

  • Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
  • Glow discharge optical emission spectroscopy (GD-OES)
  • Fourier transform infrared spectroscopy (FTIR)
  • Raman spectroscopy
  • Ultraviolet / visible spectroscopy (UV/VIS)
  • Gas chomatography mass spectrometry (GC-MS)
  • Thermal desorption gas chomatography mass spectrometry (TD GC-MS)
  • Liquid chromatography (LC)
  • Thermal gravimetric analysis (TGA)
  • Thermo-mechanical analysis (TMA)
  • Differential scanning calorimetry (DSC)

Application Notes