Balazs NanoAnalysis offers non-destructive test methods to characterize the surface cleanliness of tool parts, components and assemblies. Our experience with measuring parts cleanliness extends over 20 years.
Process Tool Cleanliness Evaluation

Sample Types

Tool Part, Component and Assembly

  • Ceramics: quartz, alumina, glass and sapphire
  • Metals: aluminum, stainless steel, molybdenum and copper
  • Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
  • Coatings: plating, anodizing and powder coating

Cleaning Process Evaluation

  • Wet benches
  • Spray tools
  • Chemical mechanical polishing (CMP)

Analyses Provided

  • Metals
  • Organics
  • Ionics
  • Particles
  • Surface Analysis
  • Critical Wipes (VC)



  • Acid extraction
  • Ultrapure water extraction
  • Solvent extraction
  • Drop scan etch (DSE)
  • Outgassing Analysis
  • Assay by Titration methods


  • Inductively coupled plasma mass spectroscopy (ICP-MS)
  • Energy dispersive spectroscopy (EDS)
  • Gas chromatography mass spectroscopy (GC-MS)
  • Fourier transform infrared (FTIR)
  • Raman spectroscopy
  • Total organic carbon (TOC)
  • Ion chromatography (IC)
  • Liquid particle counting (LPC)
  • Non-volatile residue (NVR)
  • Thermal Desorption Spectroscopy (TDS or RGA)
  • XPS (VC)

Application Notes