Process Tool Cleanliness Evaluation | Balazs Portal

Balazs NanoAnalysis offers non-destructive test methods to characterize the surface cleanliness of tool parts, components and assemblies. Our experience with measuring parts cleanliness extends over 20 years.

Sample Types

Tool Part, Component and Assembly

Ceramics: quartz, alumina, glass and sapphire
Metals: aluminum, stainless steel, molybdenum and copper
Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
Coatings: plating, anodizing and powder coating

Cleaning Process Evaluation

Wet benches
Spray tools
Chemical mechanical polishing (CMP)

Analyses Provided

Metals
Organics
Ionics
Particles
Surface Analysis
Critical Wipes (VC)

Techniques

Sampling

Acid extraction
Ultrapure water extraction
Solvent extraction
Drop scan etch (DSE)
Outgassing Analysis
Assay by Titration methods

Analytical

Inductively coupled plasma mass spectroscopy (ICP-MS)
Energy dispersive spectroscopy (EDS)
Gas chromatography mass spectroscopy (GC-MS)
Fourier transform infrared (FTIR)
Raman spectroscopy
Total organic carbon (TOC)
Ion chromatography (IC)
Liquid particle counting (LPC)
Non-volatile residue (NVR)
Thermal Desorption Spectroscopy (TDS or RGA)
XPS (VC)

Application Notes