Sample Types
Tool Part, Component and Assembly
- Ceramics: quartz, alumina, glass and sapphire
- Metals: aluminum, stainless steel, molybdenum and copper
- Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
- Coatings: plating, anodizing and powder coating
Cleaning Process Evaluation
- Wet benches
- Spray tools
- Chemical mechanical polishing (CMP)
Analyses Provided
- Metals
- Organics
- Ionics
- Particles
- Surface Analysis
- Critical Wipes (VC)
Techniques
Sampling
- Acid extraction
- Ultrapure water extraction
- Solvent extraction
- Drop scan etch (DSE)
- Outgassing Analysis
- Assay by Titration methods
Analytical
- Inductively coupled plasma mass spectroscopy (ICP-MS)
- Energy dispersive spectroscopy (EDS)
- Gas chromatography mass spectroscopy (GC-MS)
- Fourier transform infrared (FTIR)
- Raman spectroscopy
- Total organic carbon (TOC)
- Ion chromatography (IC)
- Liquid particle counting (LPC)
- Non-volatile residue (NVR)
- Thermal Desorption Spectroscopy (TDS or RGA)
- XPS (VC)
Application Notes
- APP0313 SARIS Material Analysis
- APP0357 Organic Outgas Analysis
- APP0384 Qualification of Lithography Tools
- APP0456 Vapor Phase Decomposition ICP-MS
- APP0462 Film Characterization
- APP0466 Contamination Identification
- APP0468 Coupons and Parts Cleanliness Testing
- APP0469 Surface Cleanliness Testing
- APP0470 Photovoltaic Contamination Solution